Standard SEMI E5 – Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II) SECS/GEM
Standard SEMI E37 – Specification for High-Speed SECS Message Services (HSMS) Generic Services SECS/GEM
Standard SEMI E30 – Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) SECS/GEM
Standard SEMI E192 – Guide for Equipment Adoption Criteria for GEM and GEM-related Standards SECS/GEM, GEM300
