Introduction to the SEMI E37 Standard
The SEMI E37 Standard, also known as High-Speed SECS Message Services (HSMS), enables reliable, high-speed communication between semiconductor manufacturing equipment and host systems. HSMS defines the protocol layer for exchanging messages between factory host software and the equipment implementing SECS/GEM and GEM 300 interfaces. The TCP/IP-based protocol enables very efficient message transfer.
Purpose of the SEMI E37 Standard
The SEMI E37 Standard standardizes high-speed, point-to-point communication for equipment by using TCP/IP to send and receive SEMI E5 (SECS-II) messages. This ensures protocol-layer interoperability among equipment from different manufacturers without requiring customization, The HSMS protocol is a key protocol technology to implement process control, data collection, and equipment monitoring application within semiconductor factories and other industries.
The SEMI E37 Standard addresses the limitations of the SECS-I communication protocol in complex manufacturing environments. The SECS-I standard which lacked the speed and flexibility required by modern manufacturing ecosystems yet uses the same SECS-II message layer.
Key Concepts and Features of SEMI E37
- TCP/IP Communication: Defines a communication state model, timeouts and messages that establish communication, disconnect communication, ping the connection and send SECS-II messages. Allows any physical layer that supports TCP/IP, including Ethernet (IEEE 802.3).
- Interoperability: Ensures that independent manufacturers can create equipment that seamlessly communicate within standardized frameworks, reducing integration efforts. Any software library that supports TCP/IP can implement HSMS communication.
- Subordinate Standards:
- SEMI E37.1 (HSMS-SS): Defines single-session communication, optimized for simple point-to-point interactions. All modern SECS/GEM and GEM 300 implementations support this protocol. HSMS and HSMS-SS are often used synonymously.
- SEMI E37.2 (HSMS-GS): A withdrawn standard that supported cluster tool environments and allowed for more complex session management.
- Communication Efficiency:
- Enables real-time data exchange for applications like equipment monitoring, data collection, alarm reports, and control functions.
- Standardizes failure handling procedures to minimize downtime and enhance reliability in manufacturing operations.
- Makes it easy to establish communication. Once the physical network is connected, the active entity (typically the factory host software) only needs to know the IP address, port number and device ID.
Importance of the SEMI E37 Standard to the Industry
The SEMI E37 Standard is critical for the semiconductor industry and other industries that embrace this mature technology, offering significant benefits across the ecosystem.
- For Equipment Suppliers:
- Simplifies the hardware and software development of communication interfaces, ensuring equipment complies with industry standards.
- Enhances equipment value by enabling rapid equipment integration into all factories that use this standard.
- For Factories:
- Promotes global adoption of uniform communication standards, reducing deployment complexities and costs. Drives the advancement of smart manufacturing and Industry 4.0 initiatives through streamlined equipment interoperability.
- Enhances operational efficiency through reliable, high-speed data exchange. Enables real-time equipment monitoring and control, reducing delays and improving yield.
- For Software Developers:
- Provides a framework for creating software that supports equipment connectivity and standardized communication protocols.
- Facilitates integration of advanced features such as predictive maintenance and data-driven process optimization.
PDF Solutions Products Supporting SEMI E37
Cimetrix offers a range of software products that fully support the SEMI E37 Standard, ensuring seamless and efficient adoption of HSMS communication protocols:
Equipment-Side
- Cimetrix CIMConnect: Provides an SECS/GEM interface for equipment suppliers, enabling seamless communication with factory hosts.
- Cimetrix CIM300: Supports GEM300 standards compliance for 300mm fabs, combining GEM, E87, E90, and other standards.
- Cimetrix CIMControlFramework: A complete software framework for equipment automation systems, designed to integrate seamlessly with SEMI standards.
Factory-Side
- Sapience Data Platform: A host-side solution supporting SEMI standards, enabling efficient factory host operations.
- Cimetrix HostConnect: An enhanced software library for creating host applications using SECS-II messaging over HSMS.
- Cimetrix SECSConnect: A library for creating applications using SECS-II messaging over SECS-I or HSMS.
Test
- Cimetrix EquipmentTest: A comprehensive SECS/GEM testing solution engineered to validate equipment interface compliance with SEMI standards and streamline integration with factory host systems.