Data Analytics for University Nanofabs: Enabling Innovations and Facilitating Lab-to-Fab Technology Transfer – Download

This presentation, delivered by Brian Thibeault of the University of California Santa Barbara (UCSB), details the strategic implementation of manufacturing data analytics within an open-access nanofabrication facility. It explores how the UCSB Nanofab utilizes PDF Solutions’ Exensio platform to transition from reactive maintenance to proactive statistical process control (SPC), addressing challenges inherent in high-mix, R&D environments. The document provides specific technical case studies regarding SiO2 and InP etching, illustrating how correlative data analysis, outlier detection, and machine matching significantly improve process reproducibility and facilitate efficient lab-to-fab technology transfer.

Download the full presentation to examine the technical data and operational methodologies used to optimize nanofab performance